Maya2000®
Pro Spectrometer Extends to VUV
Spectral measurements to 153 nm can be achieved
easily and economically with the
high-sensitivity Maya2000 Pro with Extra-Deep-UV
Option. Nitrogen purging of the spectrometer
helps to mitigate water and oxygen absorption in
the vacuum ultraviolet.
Introduction:
A variety of materials have spectral signatures
in the vacuum ultraviolet (VUV) spectral region,
typically described as the region from 10 nm-200
nm1, 2. VUV spectroscopy is useful for
applications ranging from biomedicine to
semiconductor testing. Because the spectral
response of standard silicon charge-coupled
device (CCD) detectors drops off rapidly at
wavelengths as long as 400 nm, and because
oxygen and water absorb in the VUV spectral
band, maintaining sufficient signal outside a
vacuum is not possible. Designing
vacuum-compatible spectrometers to address these
issues can be difficult and expensive. As a
result, most commercially available VUV
spectrometers require custom configuration and
are too expensive and unwieldy for many common
applications.
The Maya2000 Pro3 with Extra-Deep UV Option is
poised to change that. The spectrometer features
a 101.6-mm focal length optical bench with a
compact crossed Czerny-Turner design and a
back-thinned CCD detector that offers superior
UV and VUV performance. To minimize signal
attenuation inside the optical path, the
spectrometer bench is purged with nitrogen,
achieving a robust signal for VUV experiments at
wavelengths as low as 153 nm.
Experimental Conditions:
To test performance, we started with a Maya2000
Pro configured with a high resolution,
UV-enhanced 2400g/mm holographic diffraction
grating and a 5 µm slit. The back-thinned
detector (Hamamatsu S10420-1106) features a peak
quantum efficiency of 75%, with UV quantum
efficiencies as high as 50%. A custom magnesium
fluoride (MgF2) glass window is placed over the
detector for improved transmission over VUV
wavelengths.
The test sample for the experiment was a VUV
deuterium lamp with a VUV-grade optical window,
coupled directly to the spectrometer. We
enclosed the source and spectrometer and purged
the region with standard laboratory-grade
nitrogen.
Results:
Integration time for the measurement was 50 ms.
The resultant emission spectrum shows sharply
defined spectral peaks at wavelengths as low as
153 nm, with a strong central peak around 161 nm
(see Figure 1). The system operated with a
spectral resolution of 0.1 nm and a
signal-to-noise ratio of 450:1.
We have also used the system to measure a
solution containing carbon, hydrogen/deuterium,
nitrogen, oxygen, sulfur, chlorine, bromine,
silicon and fluorine chromatographically
separated into a column and placed in a vacuum
chamber with a helium plasma mixture. VUV
spectral features were clearly apparent in the
spectrum, suggesting a wide variety of
short-wavelength applications is achievable.
Conclusions:
The results demonstrate that the reliable and
economical Maya2000 Pro can be easily extended
to VUV applications. If you have spectroscopy
experiments or applications in the VUV, look no
further than the Maya2000 Pro as your
short-wavelength, affordable, robust solution.
FIGURES

Figure 1:
Emission spectrum of a VUV deuterium lamp shows
clearly defined peaks, with good signal-to-noise
performance and 0.1 nm (FWHM) optical
resolution.
References
1. Wikipedia,
http://en.wikipedia.org/wiki/Ultraviolet
Website covers VUV under larger section on
ultraviolet light
2. H. Horspool, F. Lenci, CRC Handbook of
Organic Photochemistry and Photobiology, (CRC
Press, 2003).
3.
http://www.oceanoptics.com/Products/maya.asp
Web page at OceanOptics.com with full
specifications on Maya2000 Pro
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